Profile: MKS Instruments, Inc. provides instruments, subsystems and process control solutions that measure, control, power, monitor & analyze critical parameters of advanced manufacturing processes. We offer control systems, data collection & analysis software, FTIR/NDIR infrared gas analysis products, gas & vapor delivery system, heater jackets for stainless steel vacuum components, leak detectors, mass spectrometry/residual gas analysis products, ozone products, torroidal & microwave plasma sources, pressure/vacuum control solutions, and traps & effluent management system.